Combined SEM/STM
This analytical instrument has been designed for the local, non-destructive topographic and function testing of sub-micron scale devices at nanometre resolution. It allows surface characterization using STM under ultra high vacuum.
The instrument stage forms the heart of the system. It is equipped with four scanning probe modules which allow multipoint measurements on nanometre sized areas. Each probe can be independently positioned with atomic scale accuracy using piezoelectric motors. The stage is equipped for heating up to 500K to facilitate the investigation of temperature dependent behaviour.
Capability
- High performance STM imaging
- STM tip quality, approach and navigation visible by SEM
- Non-destructive four-point measurement of nanostructures at temperatures 300-500K
- SEM with <10 nm resolution
Equipment
- Omicron UHV Nanoprobe
Example
Nanotube bundle, suspended for electrical
characterisation studies between two SPM
tips, as imaged with the SEM.