Microscopy
INEX has comprehensive microscopy capabilities extending from optical microscopes through high resolution scanning electron microscopy to scanning probe microscopy. Our sample handing capability extends from wafer format to biological samples in a fluidic environment.
INEX also has an Omicron Multiprobe which combines four scanning probe microscopes operating independently within the field of view of a scanning electron microscope. This system allows comprehensive topographic and electrical characterisation of sub-micron scale devices and structures.
Capability
- Scanning electron microscopy, SEM
- Scanning tunnelling microscopy, STM (ambient and ultra-high vacuum)
- Atomic force microscopy, AFM (ambient and ultra-high vacuum, physical devices to wet biological samples)
- Combined SEM/STM (4-point Omicron Multiprobe)
- Fluorescence microscopy (biological samples)
- General inspection microscopy (wafer-scale)
- Milli- and micro-fluidic flow and particle motion characterisation (µPIV)
Equipment
- JEOL JSM-6060 SEM
- Raith 150 e-beam writer
- Veeco Nanoscope IV (AFM & STM)
- RHK ultra high vacuum STM and AFM
- Omicron Multiprobe
- Olympus BX41M fluorescence microscope with JVC video capture suite and Image proplus software
- Olympus BX51WI fluorescence microscope with Andor iXon EMCCD camera and Andor IQ software
- Dantec micro particle image velocimetry (µPIV)