MEMs
MEMS devices are mechanical components that use microfabrication methods to develop moving parts linked to electrical components for detection and actuation. These mechanical devices generally range in size from a micrometre (a millionth of a metre) to a millimetre (thousandth of a metre).
INEX is the UK’s largest and only 150mm MEMS development and production facility. We have experience in MEMS processing on multi material substrates including silicon, polymers and glass. The MEMS facility is uniquely complemented by a fully equipped Class 2 cell and molecular biology laboratory.
INEX have experience in working on a broad range of MEMS devices including accelerometers, gyroscopes, chemical detectors, planar waveguides, strain gauges, temperature sensors for aggressive environments, biosensors and implantable microelectrodes.
MEMS devices often contain novel structures and material combinations requiring specialized processing, expertise and equipment. INEX have the necessary mix of skills, expertise and equipment to develop MEMS devices from concept to production.
INEX has expertise in the following areas:
- E-beam and stepper lithography
- Micro-machining
- Hot embossing
- Metalisation
- Etching (including DRIE)
- Deposition
- Flip chip assembly
- Packaging
- Glass and polymer microfluidics
- Inspection and measurement
- Analytical services
- Surface functionalisation, cell and molecular biology
Recent customer projects have included:
- Chemical detectors
- Planar waveguides
- Water quality sensors on ceramic material
- Implantable microelectrodes